Cooling device and cooling method

A combination between:

• a first cooling device, for cooling an object to be processed to a target temperature, comprising
• a placing table having one surface,
• support means, partially extending from one surface of said placing table, for supporting the object such that the object opposes one surface of said placing table with an interval,
• temperature detection means for outputting temperature information of the object supported by said support means,
• cooling means for cooling said placing table to a temperature lower than the target temperature to cool the object supported by said support means,
• heating means for heating the object cooled by said cooling means to a temperature almost equal to the target temperature, and
• means for performing a switching operation between cooling by said cooling means and heating by said heating means on the basis of the temperature information from said temperature detection means;
• and
• a second cooling device, for cooling the object to the target temperature, comprising
• a placing table having one surface which is in direct contact with the object to support the object,
• temperature detection means, arranged in said placing table, for detecting the temperature of said placing table to output temperature information of the object,
• cooling means for cooling said placing table to a temperature lower than the target temperature to cool the object supported by said support means,
• heating means for heating the object cooled by said cooling means to a temperature almost equal to the target temperature, and
• means for performing a switching operation between cooling by said cooling means and heating by said heating means on the basis of the temperature information from said temperature detection means.

A method of selectively supplying a first coolant having a temperature lower than a target temperature and a second coolant having a temperature almost equal to the target temperature into a coolant:

• path arranged in a placing table to cool an object to be processed loaded onto said placing table to the target temperature, comprising the steps of:
• supplying the second coolant into said coolant path in advance to set the temperature of said placing table at a temperature almost equal to the target temperature;
• and
• supplying the first coolant into said coolant path the moment the temperature of said placing object is changed by loading the object onto said placing table or a predetermined time after the temperature of said placing table is changed to cool the object, and supplying the second coolant into said coolant path again after the temperature of said placing table becomes a temperature not higher than the target temperature to heat the object to a temperature almost equal to the target temperature.

A method of loading an object to be processed onto a placing table by convey means and selectively supplying a first coolant having a temperature lower than the target temperature and a second coolant having a temperature almost equal to the target temperature into a coolant path arranged in said placing table to cool the object to the target temperature, comprising the steps of:

• supplying the second coolant into said coolant path before the object is loaded onto said placing table to set the temperature of said placing table at a temperature almost equal to the target temperature;
• supplying the first coolant into said coolant path when the object is loaded onto said placing table or a predetermined time after the object is loaded onto said placing table to cool the object;
• and
• supplying the second coolant into said coolant path again after the temperature of said placing table becomes a temperature not higher than the target temperature to heat the object to the target temperature.

A method of receiving an object to be processed by delivery means on the upper portion of a. placing table, moving downward said delivery means to place the received object on said placing table, selectively supplying a first coolant having a temperature lower than a target temperature and a second coolant having a temperature almost equal to the target temperature into a coolant path arranged in said placing table to cool the object to the target temperature, comprising the steps of:

• supplying the second coolant into said coolant path before said delivery means is moved downward to set the temperature of said placing table at a temperature almost equal to the target temperature;
• supplying the first coolant into said coolant path when said delivery means is moved downward or a predetermined after said delivery means is moved downward to cool the object;
• and
• supplying the second coolant into said coolant path again after the temperature of said placing table becomes a temperature not higher than the target temperature to heat the object to the target temperature.

A method of loading an object to be processed onto a placing table by convey means and supplying a coolant having a temperature lower than the target temperature into a coolant path arranged in said placing table to cool the object to-a-temperature almost equal to the target temperature, comprising the steps of:

• setting the temperature of said placing table at the target temperature before the object is loaded onto said placing table;
• supplying the coolant into said coolant path when the object is loaded onto said placing table or a predetermined time after the object is loaded onto said placing table to cool the object;
• and
• removing the object from said placing table after the temperature of said placing table becomes a temperature not higher than the target temperature to heat the object to the target temperature in an atmosphere of a temperature almost equal to the target temperature.

A method of receiving an object to be processed by delivery means on the upper portion of a placing table, moving downward said delivery means to place the received object on said placing table, supplying a coolant having a temperature lower than a target temperature into a coolant path arranged in said placing table to cool the object to the target temperature, comprising the steps of:

• setting the temperature of said placing table at a temperature almost equal to the target temperature before said delivery means is moved downward;
• supplying the coolant into said coolant path when said delivery means is moved downward or a predetermined time after said delivery means is moved downward to cool the object;
• and
• removing the object from said placing table after the temperature of said placing table becomes a temperature not higher than the target temperature to heat the object to the target temperature in an atmosphere of a temperature almost equal to the target temperature.

A cooling device for cooling an object to be processed to a target temperature, comprising:

• support means, having a placing surface, for supporting the object on the placing surface;
• cooling means for cooling said support means to a temperature lower than the target temperature to cool the object on the placing surface;
• heating means for heating the object cooled by said cooling means to a temperature almost equal to the target temperature;
• and
• means for performing a switching operation between cooling by said cooling means and heating by said heating means on the basis of data of cooling characteristics.