Method for purifying process waste gases

A method for purifying process waste gases containing selected harmful substances comprising:

• introducing the process waste gases into a waste gas purification system having a reaction chamber, an exit, and operating parameters;
• post-treating reaction products leaving the reaction chamber in a sorbtion chamber with an associated washing agent circuit containing washing agent;
• measuring with a first detector the type and amount of selected harmful substances in the process waste gas before said waste gases enter the waste gas purification system to generate measuring signals;
• determining with a second detector the type and amount of selected harmful substances, including perfluorocarbons and hydrofluoric acid, of the reaction products leaving the waste gas purification system at the exit of the purification system to generate measuring signals;
• and
• directly using the measuring signals for adjusting the operating parameters of the waste gas purification system, said operating parameters including amount of combustible gas, amount of oxygen, amount of washing agent in the washing agent circuit, and pH of the washing agent.