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US 2001/0011699 A1Published application
Displacement measuring apparatus
AssigneeDisplacement Measuring Apparatus
InventorToshihiko Aoki
Life of this patent
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Abstract
The scale 1 has an optical grating 12 of pitch λ. Each of the light detectors PD1 and PD2 of the light detector array 22 has a plurality of the stripe-patterned portions 32 arranged at a pitch equal to λ and the connecting portion 33 interconnecting the stripe-patterned portions 32.
Claims11
A displacement measuring apparatus, comprising:
- a scale on which an scale grating is formed along a measurement axis to have a grating pitch of λ;
- and a receiving device array disposed against the scale to be relatively movable along the measurement axis, which detect the scale grating to output a plurality of displacement signals having different phases from each other, wherein the receiving device array comprises,
- a substrate;
- and
- a plurality of receiving devices having a plurality of stripe-patterned portions and connecting portions interconnecting the stripe-patterned portions to output a plurality of displacement signals having different phases from each other, the stripe-patterned portions being arranged along the measurement axis at a pitch equal to nλ (where, n is a positive integer).
2 more elements
Dependencies are inferred from the claim text.