Active anti-vibration apparatus and exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorsShinji Wakui, Isao Iwai, Takashi Maeda
Life of this patent
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Abstract
This invention relates to an active anti-vibration apparatus having an anti-vibration table on which a stage is mounted. This anti-vibration apparatus includes a pneumatic spring actuator for supporting and driving the anti-vibration table, a PI compensator for PI-compensating a target velocity signal determined by a velocity profile concerning the stage and necessary for driving the stage, and a motion mode distributing operation unit for controlling the pneumatic spring actuator in accordance with an output signal from the PI compensator.
Claims16
An active anti-vibration apparatus comprising:
- an anti-vibration table on which a stage is mounted;
- an actuator which supports and drives said anti-vibration table utilizing a fluid;
- a compensator which generates a signal by PI- or PID-compensating a target value signal concerning said stage and necessary for driving said stage, or a signal equivalent thereto;
- and
- a controller which controls said actuator in accordance with an output signal from said compensator.
A method of correcting inclination of an anti-vibration table on which a stage is mounted, comprising:
- the compensating step of generating a signal by PI- or PID-compensating a target value signal concerning said stage and necessary for driving said stage, or a signal equivalent thereto;
- and
- the controlling step of controlling said actuator which supports and drives said anti-vibration table utilizing a fluid in accordance with the generated signal.
An exposure apparatus having an original stage on which an original is to be placed, and a substrate stage on which a substrate where a pattern of the original is to be transferred is placed, at least one of said original stage and said substrate stage comprising:
- an anti-vibration table on which said stage is mounted;
- an actuator which supports and drives said anti-vibration table utilizing a fluid;
- a compensator which generates a signal by PI- or PID-compensating a target value signal concerning said stage and necessary for driving said stage, or a signal equivalent thereto;
- and
- a controller which controls said actuator in accordance with an output signal from said compensator.
A device manufacturing method including:
- the coating step of coating a substrate with a photosensitive material;
- the exposure step of transferring by an exposure apparatus a pattern of an original to the substrate coated with said photosensitive material;
- and
- the developing step of developing the substrate to which the pattern has been transferred,
- said exposure apparatus having an original stage on which the original is to be placed, and a substrate stage on which the substrate coated with the photosensitive material is to be placed, at least one of said original stage and said substrate stage comprising:
- an anti-vibration table on which said stage is mounted,
- an actuator which supports and drives said anti-vibration table utilizing a fluid,
- a compensator which generates a signal by PI- or PID-compensating a target value signal concerning said stage and necessary for driving said stage, or a signal equivalent thereto, and
- a controller which controls said actuator in accordance with an output signal from said compensator.
Dependencies are inferred from the claim text.