Substrate transfer unit and substrate treatment apparatus including the same

A substrate treatment apparatus comprising:

• an index module;
• one or more treatment modules into which a substrate is introduced from the index module to be treated;
• and
• a transfer module transferring the substrate between the treatment modules,
• wherein
• at least one of the index module and the transfer module includes a substrate transfer unit, and
• the substrate transfer unit includes comprises:
• a rail part having a length in a horizontal direction
• a vertical part moving along the rail part, guiding the vertical movement of a robot, which transfers the substrate, and having, formed therein, first flow paths that a fluid is introduced into and passes through;
• main duct parts having second flow paths formed therein that communicate with the first flow paths, having first end portions that are directly attached to the vertical part and that are inlets of the second flow paths that receive the fluid from the flow paths of the vertical part, having outlets that are formed at second end portions of the main duct parts and that face downward, and having through holes that are formed on one or both sides of each of the second end portions;
• and
• auxiliary duct parts surrounding the through holes at the second end portions of the main duct parts and having, formed therein, expansion spaces which communicate with the second flow paths.

A substrate transfer unit comprising:

• a robot transferring a substrate;
• a rail part having a length in a horizontal direction;
• a vertical part moving along the rail part, guiding the vertical movement of the robot, having, formed therein, first flow paths that a fluid is introduced into and passes through, and having, provided therein, one or more fans which generate downward airflows;
• main duct parts having:
• second flow paths formed therein that communicate with the first flow paths,
• first end portions that are directly attached to the vertical part and that are inlets of the second flow paths that receive the fluid from the flow paths of the vertical part,
• outlets that are formed at second end portions of the main duct parts and that face downward,
• through holes that are formed on one or both sides of each of the second end portions, and
• screens that face the through holes at the rear of the outlets, that extend from inner side surfaces of the main duct parts toward the front of the main duct parts, and that are bent such that spaces are formed between the screens and the through holes and that the width of the second flow paths is reduced;
• and
• auxiliary duct parts surrounding the through holes at the second end portions of the main duct parts, having, formed therein, expansion spaces which communicate with the second flow paths, and having openings formed at lower parts thereof, adjacent to the outlets of the main duct parts,
• wherein
• the auxiliary duct parts include first surfaces, which are connected to the main duct parts and are provided at the rear of the auxiliary duct parts, second surfaces, which are connected to the main duct parts and are provided at the front of the auxiliary duct parts to face the first surfaces, third surfaces, which are connected to the main duct parts, connect the first surfaces and the second surfaces, and form top surfaces of the auxiliary duct parts, fourth surfaces, which are connected to the first surfaces, the second surfaces, and the third surfaces and face the through holes, and inclined plates, which face the through holes and are downwardly inclined in directions from the main duct parts to the auxiliary duct parts, and
• the first surfaces and the fourth surfaces of the auxiliary duct parts extend downwardly below lower ends of the main duct parts.