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US 12,772,739 B2Granted
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKentaro Nakamura, Tetsuya Kimura
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Abstract
An acoustic wave device includes a scandium-containing aluminum nitride film (ScAlN film), and an electrode on the ScAlN film. The ScAlN film includes at least one portion where a crystal orientation toward 90° from a crystal c-axis direction is rotated about 30°±5° or rotated about 15°±5°, the crystal c-axis direction being a film thickness direction of the ScAlN film or substantially a film thickness direction of the ScAlN film.
Claims20
An acoustic wave device comprising:
- a scandium-containing aluminum nitride film;
- and
- an electrode on the scandium-containing aluminum nitride film;
- wherein
- the scandium-containing aluminum nitride film includes at least one portion where a crystal orientation toward 90° from a crystal c-axis direction is rotated about 30°±5° or rotated about 15°±5°, the crystal c-axis direction being a film thickness direction of the scandium-containing aluminum nitride film or substantially a film thickness direction of the scandium-containing aluminum nitride film.
2 more elements
Dependencies are inferred from the claim text.