Piezoelectric element, liquid ejection head, and printer

Abstract

A piezoelectric element includes: a first electrode; a second electrode; and a piezoelectric layer provided between the first electrode and the second electrode and including a plurality of layers containing a complex oxide having a perovskite type structure containing potassium, sodium, and niobium, in which an X-ray diffraction method is used to measure asymmetric reflection of the piezoelectric layer in a range in which sin2ψ is 0 or more and 0.7 or less, ψ being a tilt angle, an obtained peak is separated into a high-angle-side peak and a low-angle-side peak, a lattice constant in a thickness direction of the piezoelectric layer is obtained based on the low-angle-side peak, and in a case where a plurality of the lattice constants are plotted for the range, when a plurality of plots are linearly approximated by a least squares method, a slope of an approximate straight line is 0.002 or less.

Dependencies are inferred from the claim text.