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US 12,772,722 B2Granted
Display apparatus and, apparatus and method of manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorsJaesuk Dustin Moon, Sangshin Lee, Seungjin Lee, Eunjoung Jung
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Abstract
One or more embodiments include a display apparatus including an opening, an apparatus for manufacturing the display apparatus, and a method of manufacturing the display apparatus capable of reducing generation of gas or foreign matter.
Claims12
An apparatus for manufacturing a display apparatus, the apparatus comprising:
- a chamber;
- a source portion arranged in the chamber and configured to supply a deposition material into the chamber;
- a first mask configured to be arranged in the chamber and comprising a first opening, through which the deposition material is configured to pass;
- and
- a second mask configured to be selectively arranged in the chamber to be replaceable with the first mask, the second mask comprising a second opening, through which the deposition material is configured to pass,
- wherein the first mask comprises a first protrusion protruding towards an inner portion of the first opening and configured to block the deposition material,
- wherein a portion of an inner surface of the first opening adjacent to the first protrusion has a concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged,
- wherein the second mask comprises a second protrusion protruding towards an inner portion of the second opening and configured to block the deposition material, and
- wherein a portion of an inner surface of the second opening adjacent to the second protrusion has the concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged, a largest protrusion of the protrusions of the second mask having a width that is twice a thickness of the second mask or less.
6 more elements
An apparatus for manufacturing a display apparatus, the apparatus comprising:
- a chamber;
- a display substrate of the display apparatus arranged in the chamber, the display substrate comprising a first deposition area, and a second deposition area;
- a source portion arranged in the chamber and configured to supply a deposition material into the chamber;
- a first mask configured to be arranged in the chamber and comprising a first opening, through which the deposition material is configured to pass,
- wherein the first mask comprises a first protrusion protruding towards an inner portion of the first opening and configured to block the deposition material,
- wherein a portion of an inner surface of the first opening adjacent to the first protrusion has a concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged, a largest protrusion of the protrusions having a width that is twice a thickness of the first mask or less;
- and
- a second mask configured to be selectively arranged in the chamber to be replaceable with the first mask, the second mask comprising a second opening, through which the deposition material is configured to pass,
- wherein the second mask comprises a second protrusion protruding towards an inner portion of the second opening and configured to block the deposition material,
- wherein a portion of an inner surface of the second opening adjacent to the second protrusion has the concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged, a largest protrusion of the protrusions of the second mask having a width that is twice a thickness of the second mask or less,
- wherein the deposition material is configured to pass through the first opening to be deposited on a part of the display substrate to form the first deposition area and is configured to pass through the second opening to be deposited on a different part of the display substrate to form the second deposition area and different from the first deposition area,
- wherein the first deposition area and the second deposition area are connected to each other to form one display area on the display substrate, and
- wherein the first deposition area and the second deposition area at least partially overlap with each other.
10 more elements
An apparatus for manufacturing a display apparatus, the apparatus comprising:
- a chamber;
- a source portion arranged in the chamber and configured to supply a deposition material into the chamber;
- a first mask configured to be arranged in the chamber and comprising a first opening, through which the deposition material is configured to pass;
- and
- a second mask configured to be selectively arranged in the chamber to be replaceable with the first mask, the second mask comprising a second opening, through which the deposition material is configured to pass,
- wherein the first mask comprises a first protrusion protruding towards an inner portion of the first opening and configured to block the deposition material,
- wherein a portion of an inner surface of the first opening adjacent to the first protrusion has a concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged,
- wherein the second mask comprises a second protrusion protruding towards an inner portion of the second opening and configured to block the deposition material, and
- wherein a portion of an inner surface of the second opening adjacent to the second protrusion has the concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged,
- wherein two or more of the protrusions of the first mask are different from one another, the concavo-convex shape of the first mask being atypical, and
- wherein two or more of the protrusions of the second mask are different from one another, the concavo-convex shape of the second mask being atypical.
8 more elements
Dependencies are inferred from the claim text.