Vertical FIN-based field effect transistor (FINFET) with varying conductivity regions

A method of fabricating a transistor array, the method comprising:

• forming an array of FinFETs comprising a plurality of rows and columns of active fins with source contacts, wherein each of the active fins is surrounded by an active gate region;
• forming one or more rows of first inactive fins disposed on a first set of sides of the array of FinFETs, wherein each of the first inactive fins is surrounded by an additional gate region;
• forming one or more columns of second inactive fins disposed on a second set of sides of the array of FinFETs, wherein each of the second inactive fins is surrounded by the additional gate region;
• forming a neutralization mask having openings exposing the first inactive fins, the second inactive fins, and a portion of the additional gate region;
• and
• reducing an electrical conductivity of the first inactive fins, the second inactive fins, and the portion of the additional gate region.

A vertical fin-based field effect transistor (FinFET) device comprising:

• an array of FinFETs comprising a plurality of rows and columns of active fins with source contacts and characterized by a first electrical conductivity;
• one or more rows of first inactive fins disposed adjacent a first set of sides of the array of FinFETs;
• one or more columns of second inactive fins disposed adjacent a second set of sides of the array of FinFETs, wherein the first inactive fins and the second inactive fins are characterized by a second electrical conductivity less than the first electrical conductivity;
• an active gate region surrounding the FinFETs of the array of FinFETs and characterized by a third electrical conductivity;
• and
• a neutralized gate region surrounding the first inactive fins and the second inactive fins and characterized by a fourth electrical conductivity less than the third electrical conductivity,
• wherein:
• the second electrical conductivity is reduced by at least 90% of the first electrical conductivity.