Semiconductor structure and manufacturing method therefor

Abstract

A semiconductor structure includes a substrate, a nucleation layer, a buffer layer and a heterojunction structure layer that are stacked sequentially. The nucleation layer includes a first nucleation layer and a second nucleation layer. The first nucleation layer includes a plurality of strip-shaped structures, a strip-shaped trench is formed between two adjacent strip-shaped structures in the plurality of strip-shaped structures, and an extension direction of the strip-shaped trench is parallel to a plane where the substrate is located. The strip-shaped trench and the first nucleation layer are covered by the second nucleation layer, and an ion penetration capability of the second nucleation layer is higher than an ion penetration capability of the first nucleation layer. The technical solutions of the present disclosure may improve a linearity of a device.

Dependencies are inferred from the claim text.