Focus ring placement table

A focus ring placement table comprising:

• an annular ceramic heater on which a focus ring is placed;
• a metal base;
• an adhesive element bonding the metal base and the ceramic heater;
• an inner-peripheral-side protective element disposed between the metal base and the ceramic heater and bonded to an inner peripheral portion of the adhesive element;
• and
• an outer-peripheral-side protective element disposed between the metal base and the ceramic heater and bonded to an outer peripheral portion of the adhesive element,
• wherein a coefficient of thermal expansion of the adhesive element is smaller than a coefficient of thermal expansion of the inner-peripheral-side protective element and is greater than a coefficient of thermal expansion of the outer-peripheral-side protective element, and
• wherein the adhesive element, the inner-peripheral-side protective element, and the outer-peripheral-side protective element each comprise a respective epoxy resin, acrylic resin or silicone resin and each are respectively of differing compositions.