Coated part for plasma processing chamber

A method for forming and using a component for a plasma processing chamber, comprising:

• providing a metal component body with a plasma facing surface;
• forming an anodized layer over the plasma facing surface of the metal component body, wherein the anodized layer is unsealed;
• and
• plasma spraying a coating over the anodized layer, while the anodized layer is unsealed, wherein the plasma spray coating comprises at least one of yttrium aluminum oxide, spinel (MgAl2O4 in a cubic crystal system), and lanthanum zirconium oxide (LZO).