Ablating material for an object in a particle beam device

A method for ablating a plurality of materials from a material unit and for arranging the plurality of materials on an object arranged in a particle beam apparatus, comprising:

• feeding a particle beam with charged particles onto the plurality of materials, wherein the plurality of materials is arranged on the material unit and/or wherein the material unit is formed from the plurality of materials, wherein the plurality of materials is ablatable from the material unit and wherein the plurality of materials is arranged on the material unit at a distance from the object;
• ablating the ablatable plurality of materials arranged on the material unit from the material unit using the particle beam;
• arranging the ablated plurality of materials on the object as at least one of:
• a mixture of the plurality of materials and an alloy of the plurality of materials;
• and
• examining and/or observing the ablated plurality of materials using a secondary ion mass spectrometer during ablation of the plurality of materials from the material unit using the particle beam and during arranging the ablated plurality of materials on the object.