Charged particle beam writing apparatus and charged particle beam writing method

A charged particle beam writing method comprising:

• irradiating a target object with a charged particle beam which is deflected by being applied with a deflection potential output by an amplifier, using a charged particle beam writing apparatus that includes
• an electrode configured to deflect the charged particle beam,
• a diagnostic circuit configured to diagnose the amplifier,
• a switching circuit arranged between an output of the amplifier and the electrode and having a switch, the switching circuit being configured to switch the deflection potential output by the amplifier between the electrode and the diagnostic circuit and configured to apply the deflection potential of the amplifier to the diagnostic circuit in a case that the switch is connected to the diagnostic circuit and the switch is detached from the electrode, wherein the diagnostic circuit diagnoses the amplifier using the deflection potential applied through the switch,
• an electron optical system configured to irradiate the target object with the charged particle beam deflected by being applied with the deflection potential by the amplifier,
• a column configured to include therein the electrode and the electron optical system,
• a first coaxial cable configured to connect an output side of the amplifier with the switching circuit,
• a second coaxial cable configured to connect the electrode with the switching circuit,
• a third coaxial cable configured to connect the output side of the amplifier with the diagnostic circuit, and
• a resistance configured to connect, parallelly to the switching circuit, an inner conductor of the first coaxial cable with an inner conductor of the second coaxial cable, wherein
• the inner conductor of the first coaxial cable is connected to one end side of the inner conductor of the second coaxial cable through the switching circuit, an outer conductor of the first coaxial cable is connected to one end side of an outer conductor of the second coaxial cable through the switching circuit,
• the inner conductor of the first coaxial cable is connected to one end side of an inner conductor of the third coaxial cable through the switching circuit, the outer conductor of the first coaxial cable is connected to one end side of an outer conductor of the third coaxial cable through the switching circuit, and,
• in a case of switching the output of the amplifier to a side of the electrode, the switching circuit detaches both the inner conductor and the outer conductor of the third coaxial cable from the first coaxial cable;
• switching the output of the amplifier to a side of the diagnostic circuit by the switching circuit;
• and
• diagnosing the output of the amplifier by the diagnostic circuit, and outputting a result.