High-voltage insulating structure, charged particle gun, and charged particle beam device
AssigneeHitachi High-Tech Corporation
InventorsYasuchika Suzuki, Shinichi Kato, Takashi Ohnishi, Shunichi Watanabe
Life of this patent
Estimating the term…
Loading patent…
AssigneeHitachi High-Tech Corporation
InventorsYasuchika Suzuki, Shinichi Kato, Takashi Ohnishi, Shunichi Watanabe
Estimating the term…
A high-voltage insulating structure in which an electrically conductive part, to which a high voltage is applied and which extends in an axial direction, is surrounded by an insulator. An electrical resistivity of the third insulator is smaller than electrical resistivities of the first and second insulators. As for a thickness of the third insulator in the axial direction, a first thickness at an outer side farther from the electrically conductive part is less than a second thickness at an inner side closer to the electrically conductive part.
A high-voltage insulating structure in which an electrically conductive part, to which a high voltage is applied and which extends in an axial direction, is surrounded by an insulator, wherein
Dependencies are inferred from the claim text.