A modular multi-pipe pressure regulator for semiconductor manufacturing machine, used for regulating pressure in pipelines of at least one semiconductor manufacturing machine coupled to liquid supply devices, comprising:
- 2~10 pump drive connectors provided for coupling external suction pumps, respectively, each external suction pump being coupled to a corresponding one of the liquid supply devices and using a corresponding one of the pipelines to couple the at least one semiconductor manufacturing machine, such that the corresponding one of the liquid supply devices, the modular multi-pipe pressure regulator, and the at least one semiconductor manufacturing machine are coupled to each other through the corresponding one of the pipelines to form an integral closed pipeline loop for circulating a liquid;
- 2~10 switches corresponding to the 2~10 pump drive connectors on a one-to-one correspondence;
- 2~10 pressure detectors corresponding to the 2~10 pump drive connectors on a one-to-one correspondence, and installed in the corresponding one of the pipelines of the at least one semiconductor manufacturing machine, for detecting the pressure in the corresponding one of the pipelines and feeding back a pressure value;
- 2~10 rotation speed regulators, corresponding to the 2~10 pump drive connectors on a one-to-one correspondence, for modulating a rotation speed of a corresponding external suction pump;
- a controller, having an intelligent computing model and being extended with a plurality of power supply branches and a plurality of signal control lines, the plurality of power supply branches and the plurality of signal control lines being electrically coupled to the 2~10 pump drive connectors and the 2~10 rotation speed regulators, the 2~10 switches being interconnected between the controller and each of the 2~10 pump drive connectors, and the controller being telecommunicatively coupled to the 2~10 pressure detectors, such that when the controller receives an external power drive signal, the controller independently controls an ON or OFF state of each of the 2~10 switches, and after a switch is turned on, the controller independently controls a corresponding pump drive connector and a corresponding rotation speed regulator, and the corresponding pump drive connector drives the corresponding external suction pump to work and monitor the rotation speed to obtain a plurality of time point rotational speeds, at the same time, the controller receives each pressure value fed back by a corresponding pressure detector, detects each of the pressure values according to a set value, and drives the corresponding rotation speed regulator to regulate the rotation speed of the corresponding external suction pump, so as to maintain a corresponding pressure value of the corresponding one of the pipelines within a tolerance range of the set value;
- and
- 2~10 alarms corresponding to the 2~10 pump drive connectors on a one-to-one correspondence, and electrically coupled to the controller by the plurality of power supply branches and the plurality of signal control lines, the controller detecting the pressure values to obtain an abnormal change of one of the pressure values of the pipelines during a period, and outputting a warning signal by a corresponding alarm, and after outputting the warning signal, the controller waiting for and confirming a corresponding device operation after the modular multi-pipe pressure regulator releases the warning signal, in addition, the controller using the corresponding device operation and new corresponding time point rotational speeds and pressure values, that are subsequently received, to verify an accuracy of the warning signal of a previous time point, so as to learn and modify an intelligent computing model.