Positive resist material and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Hatakeyama, Naoki Ishibashi, Masayoshi Sagehashi
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Hatakeyama, Naoki Ishibashi, Masayoshi Sagehashi
Estimating the term…
A positive resist material contains an acid generator, and a base polymer containing a repeating unit having two carboxyl groups whose hydrogen atoms are substituted with two tertiary carbon atoms each bonded to a double bond or triple bond. The repeating unit having two carboxyl groups whose hydrogen atoms are substituted with two tertiary carbon atoms each bonded to a double bond or triple bond is represented by a repeating unit-a in the following formula (1). Thus, the present invention provides: a positive resist material having higher sensitivity than conventional positive resist materials and smaller dimensional variation; and a patterning process.
A positive resist material comprising:
Dependencies are inferred from the claim text.