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US 12,768,876 B1Granted
Load pull tuner with integrated on-wafer planarity control
OwnerChristos Tsironisinventor
Life of this patent
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Abstract
Planarity adjustment of RF microprobes in a load pull setup on wafer, using a low-profile impedance tuner that is mounted on a 3-axis tuner positioner under an angle matching the angle of the wafer probe is performed using a separation of the tuning module from the tuner housing and allowing it to rotate around an axis through the tips of the wafer microprobe. This renders the directly connected tuner autonomous and compatible with all existing probe stations.
Claims4
A load pull tuner incorporating a tuning module and a control mechanism for the planarity of auxiliary wafer microprobes directly connected to the tuning module,
- wherein
- the load pull tuner has an enclosure that houses the tuning module, and wherein
- the auxiliary wafer microprobes comprise a body, probe tips and a coaxial connector,
- and wherein
- the tuning module comprises:
- a slabline with a center conductor linking a test port with an idle port, each said port being equipped with a coaxial connector, and at least one remotely controlled carriage moving along the slabline and holding a tuning probe remotely insertable into and movable along the slabline;
- the load pull tuner further includes the planarity control mechanism configured to control the planarity of the auxiliary wafer microprobes, which said planarity control mechanism is mounted perpendicular to the slabline and controls a rotation of the tuning module,
- and wherein
- the coaxial connector of the auxiliary wafer microprobes and the coaxial connector of the test port of the slabline are aligned and directly connected,
- and wherein
- the tuning module can be rotated around a rotation axis through the probe tips of the auxiliary wafer microprobes.
8 more elements
Dependencies are inferred from the claim text.