Testing apparatus and testing method

An inspection apparatus for inspecting an inspection target device,

• wherein the inspection target device is a backside-illumination imaging device, on which light is incident from a back surface opposite to a side where a wiring layer is provided, and is formed on an inspection target object,
• the inspection apparatus comprising:
• a placing table configured to support the inspection target object while facing the back surface of the imaging device,
• wherein the placing table includes:
• a transparent placing surface on which the inspection target object is placed;
• and
• an irradiation part disposed below the placing surface and configured to irradiate light toward the inspection target object placed on the placing surface,
• wherein the irradiation part includes:
• a light guiding plate having a facing surface facing the inspection target object with the placing surface interposed therebetween;
• and
• a light source part disposed in a region laterally outside from the light guiding plate and configured to emit light toward a lateral edge surface of the light guiding plate,
• wherein the light guiding plate emits light, which is emitted from the light source part and incident on the lateral edge surface of the light guiding plate, from the facing surface toward the placing surface,
• the placing table further includes an optical member that transmits light directed from the facing surface of the light guiding plate toward the inspection target object placed on the placing surface, and
• the optical member is divided into a plurality of regions, with light transmittance configured to be variable for each region.