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US 12,768,758 B2Granted
Specimen holder, specimen holder set, and specimen preparation method
AssigneeJEOL Ltd.
InventorsTsutomu Negishi, Shinobu Mori
Life of this patent
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Abstract
A specimen holder includes a holder main body, a specimen mount to which a specimen is to be fixed, and a pressing member which slidably presses the specimen mount against the holder main body. A through-hole is provided in the specimen mount, and the specimen mount is tilted with respect to the holder main body by tilting a rod-like member which is inserted into the through-hole.
Claims13
A specimen holder comprising:
- a holder main body comprising a recessed portion;
- a specimen mount to which a specimen is to be fixed, the specimen mount is arranged in the recessed portion of the holder main body, a width of the recessed portion being greater than a width of the specimen mount allowing the specimen mount to be tilted with respect to the holder main body;
- and
- a pressing member which slidably presses the specimen mount against the holder main body,
- wherein the pressing member comprises a first plunger and a second plunger, and
- wherein the first plunger comprises:
- a first contact member which comes into contact with the specimen mount;
- a first spring which imparts a pressing force to the first contact member;
- and
- a first shaft which has an outer circumferential surface on which a male screw is formed, and in which the first spring is housed,
- the second plunger comprises:
- a second contact member which comes into contact with the specimen mount;
- a second spring which imparts a pressing force to the second contact member;
- and
- a second shaft which has an outer circumferential surface on which a male screw is formed, and in which the second spring is housed,
- the male screw formed on the first shaft screws with a female screw formed on an inner surface of a first hole provided in the holder main body,
- the male screw formed on the second shaft screws with a female screw formed on an inner surface of a second hole provided in the holder main body,
- a force by which the first plunger presses the specimen mount against the holder main body changes by rotating the first plunger, and
- a force by which the second plunger presses the specimen mount against the holder main body changes by rotating the second plunger.
16 more elements
A specimen holder comprising:
- a holder main body comprising a recessed portion;
- a specimen mount to which a specimen is to be fixed, the specimen mount is arranged in the recessed portion of the holder main body, a width of the recessed portion being greater than a width of the specimen mount allowing the specimen mount to be tilted with respect to the holder main body;
- a pressing member which slidably presses the specimen mount against the holder main body, the pressing member comprising a first plunger and a second plunger;
- and
- a moving mechanism which simultaneously moves the first plunger and the second plunger and which simultaneously changes forces by which the first plunger and the second plunger press the specimen mount against the holder main body.
2 more elements
A specimen preparation method comprising:
- fixing a specimen to a specimen mount;
- slidably pressing the specimen mount to which the specimen has been fixed, against a holder main body by a pressing member, the specimen mount being arranged in the recessed portion of the holder main body, a width of the recessed portion being greater than a width of the specimen mount allowing the specimen mount to be tilted with respect to the holder main body;
- and
- inserting a rod-like member into a through-hole provided in the specimen mount and adjusting a tilt of the specimen mount by tilting the rod-like member,
- wherein
- in adjusting a tilt of the specimen mount, the pressing member presses the specimen mount with a first pressing force,
- in polishing the specimen with the mechanical polishing apparatus, the pressing member presses the specimen mount with a second pressing force, and
- the first pressing force is smaller than the second pressing force.
5 more elements
Dependencies are inferred from the claim text.