US 12,768,740 B2 · Flow rate controller and leak tester

Abstract

A leak tester that includes a master container, a master side air circuit (master side), a work container, a work side air circuit (work side), a first valve, a second valve, a flow rate control valve, and a differential pressure gauge. A reference product is stored in the master container. A target product is stored in the work container. A first valve controls pressure air which is supplied to the master side and the work side. A second valve connects the master side and the work side with an outside. A flow rate control valve controls an amount of air, the air being emitted from the master side and the work side to the outside or being injected into the master side and the work side from the outside. A differential pressure gauge measures pressure difference between the master side and the work side.

Claims7

Dependent claims

A leak tester comprising:

a master container which stores a reference product;
a master side air circuit which is connected with the master container;
a work container which stores a target product;
a work side air circuit which is connected with the work container;
a first valve which controls pressure air, the pressure air being supplied to the master side air circuit and the work side air circuit;
a second valve which connects the master side air circuit and the work side air circuit with an outside;
a flow rate control valve which controls an amount of air, the air being emitted from the master side air circuit and the work side air circuit to the outside or being injected into the master side air circuit and the work side air circuit from the outside;
and
a differential pressure gauge which measures pressure difference between the master side air circuit and the work side air circuit.

6 more elements

Dependencies are inferred from the claim text.

Flow rate controller and leak tester

Life of this patent

Flow rate controller and leak tester

Life of this patent

Abstract

Claims7