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US 12,768,711 B2Granted
Vibration sensors and methods thereof
AssigneeHonda Motor Co., Ltd.
InventorsAvetik Harutyunyan, Xufan Li, Zhenan Bao, Chengyi Xu
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Abstract
Aspects of the present disclosure generally relate to vibration sensors. The vibration sensors can include a vibration sensor including at least an aperture. A polymer including a n elastomer is disposed on the frame. A nanoribbon network is disposed on the polymer. Two or more electrodes are disposed on the nanoribbon network. The two or more electrodes have a spacing of about 500 nm to about 2000 μm.
Claims20
A vibration sensor comprising:
- a frame comprising at least an aperture;
- a polymer comprising an elastomer disposed on the frame;
- a nanoribbon network disposed on the polymer;
- and
- two or more electrodes disposed on the nanoribbon network, wherein the two or more electrodes have a spacing of about 500 nm to about 2000 μm.
2 more elements
A method of producing a vibration sensor, the method comprising:
- growing a nanoribbon on a substrate selected from a group consisting of SiO2, Si, Au, c-sapphire, fluorophlogopite mica (F-mica), SrTiO3, hexagonal boron nitride (h-BN), or combinations thereof;
- forming a film by depositing a polymer on the nanoribbon;
- disposing the film on a frame;
- and
- disposing two or more electrodes on the film.
2 more elements
A method of detecting a frequency, the method comprising:
- measuring a first current of a vibration sensor, the vibration sensor comprising:
- a frame comprising at least an aperture;
- a film comprising a nanoribbon disposed on a polymer, wherein the polymer is disposed on the frame;
- and
- two or more electrodes disposed on the nanoribbon;
- bending the film of a vibration sensor from a first length to a second length;
- and
- measuring a second current of the vibration sensor.
5 more elements
Dependencies are inferred from the claim text.