US 12,768,038 B2 · Heating zone separation for reactant evaporation system

Abstract

Systems and methods related to temperature zone control systems can include a reactant source cabinet that is configured to be at least partially evacuated, a vessel base that is configured to hold solid source chemical reactant therein, and a lid that is coupled to a distal portion of the vessel base. The lid may include one or more lid valves. The system may further include a plurality of gas panel valves that are configured to deliver gas from a gas source to the vessel. The system may include a heating element that is configured to heat the one or more lid valves. The system may include a heat shield, a first portion of which is disposed between the one or more lid valves and the vessel base. A second portion of the heat shield may be disposed between the first heating element and the plurality of gas panel valves.

Claims20

Dependent claims

A method of controlling heat transfer within a reactant source cabinet, the method comprising:

continuously flowing carrier gas into a vessel base via a lid valve coupled to a lid of a vessel;
transferring heat from a first heating element of the reactant source cabinet to a top portion of the lid valve, wherein a heat shield comprising a first portion disposed between the top portion of the lid valve and the vessel base impedes a transfer of heat from the first heating element to the vessel base such that the top portion of the lid valve is maintained at a higher temperature than the vessel base;
vaporizing a chemical precursor in carrier gas in the vessel base to form a vaporized chemical reactant;
and
flowing the vaporized chemical reactant through an outlet of the lid to a reaction chamber.

2 more elements

Dependencies are inferred from the claim text.

Heating zone separation for reactant evaporation system

Life of this patent

Heating zone separation for reactant evaporation system

Life of this patent

Abstract

Claims20