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US 12,767,907 B2Granted
Aqueous cleaning liquid
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakumi Namiki, Shinji Kumada, Eita Suga, Kenta Kimura, Jun Kondo
Life of this patent
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Abstract
An aqueous cleaning liquid containing hydrofluoric acid, at least one kind of triazole compound selected from the group consisting of triazole and a triazole derivative, and a nonionic surfactant.
Claims5
An aqueous cleaning liquid comprising, with respect to the total amount of the aqueous cleaning liquid:
- from 300 ppm to 3,000 ppm of hydrofluoric acid;
- from 500 ppm to 1% by mass of at least one kind of benzotriazole compound selected from the group consisting of benzotriazole and a benzotriazole derivative;
- and
- from 50 ppm to 1% by mass of a nonionic surfactant comprising an acetylenol surfactant,
- wherein the aqueous cleaning liquid has a pH in a range of 3 to 7.
2 more elements
Dependencies are inferred from the claim text.