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US 12,767,753 B2Granted
Sequence-block copolymers and preparation therefor and application thereof
AssigneeCanton Litho Material Technology Inc.
InventorsHai Deng, Min Cao
Life of this patent
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Abstract
Sequence-block copolymers have well-controlled and precise monomer sequence. A highly ordered fluoro-containing block copolymer material can be prepared based on the sequence-block copolymer, which shows excellent patterning capability.
Claims4
An ordered fluorine-containing polymer material, wherein the fluorine-containing polymer material comprises a block copolymer, and the block copolymer comprises the sequence-block X and block Y;
- the block Y has the following structure:
- wherein, Rb1 is selected from the group consisting of H, and C1 alkyl;
- Rb2 is a fluorine-containing group;
- y is selected from the group consisting of 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, and 50;
- and the sequence-block X has a structure shown in formula (1):
- −[(AAA)m−(AB)n]p− (1)
- wherein,
- (AAA) is a homopolymeric segment of monomer A, which is formed by the homopolymerization of three monomers A;
- wherein, monomer A is a methacrylate monomer or an acrylate monomer, and polymerized to form a structure of
- each Ra1 is independently C1-C6 alkylene;
- each Ra2 is independently selected from the group consisting of H, and C1 alkyl;
- each L is independently selected from —OH, and —L1-L2-R′;
- each R′is independently selected from the group consisting of C2-C6 alkenyl;
- each —L1-L2— is independently selected from the group consisting of
- and
- m is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10;
- (AB) is a copolymerized segment of monomer A and monomer B, which is formed by copolymerization of one monomer A and one monomer B;
- the monomer B is an olefin monomer;
- and (AB) is a cyclic structure of
- or in (AB), the cyclic structure of
- hydrolyzes to form two structures of
- wherein, each Ra1 is independently C1-C6 alkylene;
- each Ra2 is independently selected from the group consisting of H, and C1 alkyl;
- each —L1-L2— is independently selected from the group consisting of
- each L is independently —OH;
- and n is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10;
- p is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9, and 10.
24 more elements
Dependencies are inferred from the claim text.