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US 12,767,527 B2Granted
Active matrix programmable mirror
AssigneeObsidian Sensors, Inc.
InventorsJohn Hong, Tallis Chang, Bing Wen, Edward Chan, Sean Andrews, Heesun Shin
Life of this patent
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Abstract
Membrane fabrication including: depositing a bottom Molybdenum (Mo) layer; depositing a polyimide (PI) layer and defining a first release hole; curing the PI layer; depositing a top Mo layer; and defining and etching a second release hole within the first release hole.
Claims1
A method for membrane fabrication, the method comprising:
- depositing a bottom Molybdenum (Mo) layer;
- depositing a polyimide (PI) layer and defining a first release hole;
- curing the PI layer;
- depositing a top Mo layer;
- and
- defining and etching a second release hole within the first release hole.
3 more elements
Dependencies are inferred from the claim text.