Chip assembly and method of making a chip assembly
AssigneeNpl Management Limited
InventorsAlastair Sinclair, Guido Wilpers, Kaushal Choonee, Michael Peter Larsson
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AssigneeNpl Management Limited
InventorsAlastair Sinclair, Guido Wilpers, Kaushal Choonee, Michael Peter Larsson
Estimating the term…
Alignment features for an optical fibre assembly are formed directly into an ion trap chip to align an optical module with respect to the ion trap chip. This is achieved using microfabrication techniques to etch alignment elements into the surface of the ion trap chip, advantageously carried out with lithographic precision achieving the alignment accuracy required of the optical beam geometries for the application, with an alignment accuracy of a few micrometres. The alignment elements are advantageously etched along defined crystal planes of the silicon substrate of the chip. An external microstructure can be micromachined with lithographic precision to contain locating features that will fit, or “plug”, into the recesses of the chip, for instance ion microtrap chip.
A method of fabricating an ion microtrap chip assembly, including
A method of fabricating an ion microtrap chip assembly, including an ion microtrap chip having a chip substrate, and one or more micro-structures disposed on the chip substrate, the method including:
An ion microtrap chip assembly comprising:
Dependencies are inferred from the claim text.