Substrate processing apparatus and substrate processing method

A substrate processing method comprising:

• (a) primarily loading a first carrier in which first substrates are stored, onto a load port module;
• (b) transferring, by a transfer robot, the first substrates from the first carrier to a first adaptor region;
• (c) unloading the first carrier from the load port module;
• (d) secondarily loading a second carrier in which second substrates are stored, onto the load port module;
• (e) transferring, by the transfer robot, the second substrates from the second carrier to a second adaptor region;
• and
• (f) transferring, by the transfer robot, the first substrates of the first adaptor region, on which a process is completed, to the second carrier after second substrates are transferred from the second carrier to the second adaptor region.

A substrate processing apparatus comprising:

• a load port module loaded with a first carrier in which first substrates are stored;
• a transfer robot configured to transfer the first substrates from the first carrier;
• a first adaptor region configured to receive and temporarily store the first substrates transferred by the transfer robot to the first adaptor region;
• a second adaptor region configured to receive and temporarily store second substrates transferred by the transfer robot from a second carrier loaded onto the load port module, after the first carrier is unloaded from the load port module;
• and
• a controller configured to apply a first substrate transfer control signal to the transfer robot to store the first substrates, which were temporarily stored in the first adaptor region and on which a process is completed, in the second carrier after second substrates are transferred from the second carrier to the second adaptor region,
• wherein the controller:
• is configured to apply a third substrate transfer control signal to the transfer robot to transfer third substrates from a third carrier loaded onto the load port module, to the first adaptor region after the second carrier is unloaded from the load port module;
• and
• is configured to apply a second substrate transfer control signal to the transfer robot to store the second substrates, which were temporarily stored in the second adaptor region and on which a process is completed, in the third carrier after the third substrates are transferred to the first adaptor region;
• or is configured to apply a second substrate transfer control signal to the transfer robot to transfer the second substrates, which were temporarily stored in the second adaptor region and on which a process is completed, to the first carrier after the second carrier is unloaded from the load port module and the first carrier is loaded a second time,
• wherein the first adaptor region is rotated by a rotating device or lifted by a lifting device.