Systems and methods for wafer overview image scan and pre-alignment of film frame carrier

Abstract

The system includes a film frame carrier (FFC) configured to support a workpiece, and the FFC is removably disposed on an FFC rotator. The system further includes an end effector configured to engage the FFC to remove the FFC from the FFC rotator and a scanner disposed in a movement path of the end effector. The scanner is configured to generate an overview image of the end effector engaged with the FFC as the end effector moves away from the FFC rotator. The system further includes a processor configured to receive the overview image from the scanner, determine an alignment between the FFC and the end effector according to the overview image, and control a movement of the end effector according to the alignment between the FFC and the end effector.

Dependencies are inferred from the claim text.