Switch based on phase-change material
AssigneesCommissariat A L'energie Atomique Et Aux Energies Alternatives, STMicroelectronics (Crolles 2) SAS, STMicroelectronics France
InventorsAlain Fleury, Stephane Monfray, Philippe Cathelin, Bruno Reig, Vincent Puyal
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Abstract
The present description concerns a switch based on a phase-change material comprising: a region of the phase-change material; a heating element electrically insulated from the region of the phase-change material; and one or a plurality of pillars extending in the region of the phase-change material, the pillar(s) being made of a material having a thermal conductivity greater than that of the phase-change material.
Claims20
A device, comprising:
- a switch that includes a phase-change material, the switch including:
- first and second conduction electrodes;
- first and second regions of the phase-change material each coupled to the first and second conduction electrodes of the switch, the second region being located above the first region;
- and
- a heating element between the first and second regions of the phase-change material and electrically insulated from the first and second regions of the phase-change material;
- and
- a first plurality of pillars extending in the first region of the phase-change material, the first plurality of pillars being made of a material having a thermal conductivity greater than that of the phase-change material.
A device, comprising:
- a substrate;
- a first and second electrode on the substrate;
- a first phase change layer on the first and second electrode;
- a heating element on the first phase change layer;
- a second phase change layer on the heating element, the heating element being between the first and second phase change layers;
- and
- a plurality of pillars extending in the first phase change layer, the pillars being made of a material having a thermal conductivity greater than that of the first phase change layer.
A method, comprising;
- forming a first and a second electrode on a substrate;
- forming a first phase change layer on the first and second electrodes;
- forming a heating element on the first phase change layer;
- forming a second phase change layer on the heating element, the heating element being between the first and second phase change layers;
- forming a first insulating layer on the first phase change layer;
- and
- forming a second insulating layer on the first insulating layer, on the first electrode, and on the second electrode.
Dependencies are inferred from the claim text.