Semiconductor device structure and methods of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng-I Lin, Shu-Han Chen, Chi On Chui
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng-I Lin, Shu-Han Chen, Chi On Chui
Estimating the term…
A semiconductor device structure and methods of forming the same are described. The structure includes a first semiconductor layer disposed over a substrate, the first semiconductor layer has an edge portion and a center portion, and a height of the center portion is substantially greater than a height of the edge portion. The structure further includes a dielectric spacer disposed below and in contact with the edge portion of the first semiconductor layer, a gate dielectric layer surrounding the center portion of the first semiconductor layer, and a gate electrode layer disposed on the gate dielectric layer surrounding the center portion of the first semiconductor layer.
A method, comprising:
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Dependencies are inferred from the claim text.