Memory device and method of forming the same
AssigneeWinbond Electronics Corp.
InventorsChien-Ming Lu, Tzu-Ming Ou Yang
Life of this patent
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Abstract
Provided is a memory device including a substrate, a plurality of bit-line structures, a plurality of conductive plugs, and a plurality of conductive pads. The substrate has a plurality of active areas. The plurality of bit-line structures are disposed on the substrate in parallel. The plurality of conductive plugs are respectively disposed aside the plurality of bit-line structures, and are electrically connected to the plurality of active areas. The plurality of conductive pads are vertically disposed between the plurality of conductive plugs and the plurality of active areas. One of the conductive plugs has a bottom area falls within a range of a top area of a corresponding conductive pad.
Claims8
A memory device, comprising:
- a substrate, having a plurality of active areas;
- a plurality of bit-line structures, disposed on the substrate in parallel;
- a plurality of conductive plugs, respectively disposed aside the plurality of bit-line structures, and electrically connected to the plurality of active areas;
- and
- a plurality of conductive pads, vertically disposed between the plurality of conductive plugs and the plurality of active areas, wherein a perimeter of one of the plurality of conductive plugs falls entirely within a perimeter of a corresponding conductive pad in a top view,
- wherein the plurality of conductive pads are embedded in the substrate, and a top surface of the plurality of conductive pads is level with a top surface of the plurality of active areas.
Dependencies are inferred from the claim text.