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US 12,764,849 B2Granted
Acoustic xenon droplet generator
AssigneeKLA Corporation
InventorSherman Seelinger
Life of this patent
Estimating the term…
Abstract
A cup to hold liquid Xe is disposed in a vacuum chamber. The cup has an open top. A piezoelectric transducer is disposed in the cup to generate acoustic waves through the liquid Xe in the cup. The acoustic waves create liquid Xe droplets that fly out of the cup. A laser may generate laser-beam pulses, which are focused by optics onto respective liquid Xe droplets that have flown out of the cup, to generate EUV light.
Claims20
An apparatus, comprising:
- a vacuum chamber;
- a cup, disposed in the vacuum chamber, to hold liquid Xenon (Xe), the cup having an open top;
- and
- a piezoelectric transducer, disposed in the cup, to generate acoustic waves through the liquid Xe in the cup;
- wherein the acoustic waves are to create liquid Xe droplets that fly out of the cup.
2 more elements
A method, comprising:
- producing a vacuum in a vacuum chamber;
- with the vacuum in the vacuum chamber, holding liquid Xenon (Xe) in a cup with an open top, the cup being disposed in the vacuum chamber;
- and
- with the vacuum in the vacuum chamber, generating acoustic waves through the liquid Xe in the cup, using a piezoelectric transducer disposed in the cup;
- wherein the acoustic waves create liquid Xe droplets that fly out of the cup.
2 more elements
Dependencies are inferred from the claim text.