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US 12,763,753 B2Granted
Composite substrate and method of producing composite substrate
AssigneeNGK Insulators, Ltd.
InventorMinori Tani
Life of this patent
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Abstract
A composite substrate according to includes: a support substrate; and a piezoelectric layer arranged on one side of the support substrate, wherein an amplitude of a waviness having a spatial frequency of more than 0.045 cyc/mm according to a shape of the support substrate is 10 nm or less.
Claims8
A composite substrate, comprising:
- a support substrate;
- and
- a piezoelectric layer arranged on one side of the support substrate,
- wherein an amplitude of waviness of a shape of the support substrate at a spatial frequency of more than 0.045 cyc/mm is 10 nm or less.
1 more element
A method of producing a composite substrate, comprising:
- joining a support substrate to a first main surface side of a piezoelectric substrate having a first main surface and a second main surface facing each other;
- and
- polishing a surface of the piezoelectric substrate on a second main surface side thereof,
- wherein an amplitude of waviness of a shape of the support substrate at a spatial frequency of more than 0.045 cyc/mm is 10 nm or less.
1 more element
Dependencies are inferred from the claim text.