Line narrowing laser device, and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating pulse laser light using a line narrowing laser device;
• outputting the pulse laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device,
• the line narrowing laser device including:
• an optical element and a diffractive optical element positioned on an optical path of an optical resonator;
• a wavelength actuator configured to change an incident angle of light incident on the diffractive optical element by moving the optical element;
• a wavelength driver configured to drive the wavelength actuator;
• a processor configured to receive a plurality of target wavelengths and output a wavelength control signal to the wavelength driver so that a wavelength of the pulse laser light output from the optical resonator periodically changes among the target wavelengths, thereby performing two-wavelength oscillation or multiple-wavelength oscillation;
• and
• a notch filter arranged in a path of the wavelength control signal and configured to operate at a notch frequency different from a drive frequency of the wavelength actuator.