Methods for detecting arcing in power delivery systems for process chambers

A method for detecting arcing in a power delivery system, comprising:

• receiving at least one arc indication from at least one arc detection sensor operating in a visible light spectrum, the at least one arc detection sensor positioned in at least one assembly of at least one power delivery system for a plasma process chamber, wherein the at least one arc indication includes intensity of an arc, duration of an arc, or location of an arc within an assembly of the power delivery system and wherein at least one arc detection sensor is configured to provide an intensity of an arc in a range of approximately 10,000 lux to approximately 20,000 lux;
• determining at least one location of the at least one arc indication by an arc detection controller of the plasma process chamber;
• and
• activating at least one safety interlock signal to at least one power source of the at least one power delivery system of the plasma process chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power status of the at least one power source wherein activating the at least one safety interlock signal removes power from the at least one power source.

A non-transitory, computer readable medium having instructions stored thereon that, when executed, cause a method for detecting arcs in a power delivery system to be performed, the method comprising:

• receiving at least one arc indication from at least one arc detection sensor operating in a visible light spectrum, the at least one arc detection sensor positioned in at least one assembly of at least one power delivery system for a plasma process chamber;
• determining at least one location of the at least one arc indication by an arc detection controller of the plasma process chamber;
• and
• activating at least one safety interlock signal to at least one power source of the at least one power delivery system of the plasma process chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power status of the at least one power source wherein activating the at least one safety interlock signal removes power from the at least one power source.