Substrate inspection device, substrate inspection system, and substrate inspection method

An information processing method, the method comprising:

• selecting an image set for model creation, which is a captured image set including a combination of a captured image before a process and a captured image after the process for each of the plurality of substrates, and
• creating an image estimation model by machine learning by using the captured image before the process and the captured image after the process for the image set for model creation,
• wherein the selecting the image set for model creation includes selecting the image set for model creation based on correlation information between in-plane tendency of a pixel value in the captured image before the process and in-plane tendency of a pixel value in the captured image after the process.

A non-transitory computer-readable recording medium storing a program that causes, by a computer, a substrate processing apparatus to perform a process comprising:

• selecting an image set for model creation, which is a captured image set including a combination of a captured image before a process and a captured image after the process for each of the plurality of substrates, and
• creating an image estimation model by machine learning by using the captured image before the process and the captured image after the process for the image set for model creation,
• wherein the selecting the image set for model creation includes selecting the image set for model creation based on correlation information between in-plane tendency of a pixel value in the captured image before the process and in-plane tendency of a pixel value in the captured image after the process.