Molding apparatus, molding method, and method for manufacturing a product
AssigneeCanon Kabushiki Kaisha
InventorToshiaki Ando
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AssigneeCanon Kabushiki Kaisha
InventorToshiaki Ando
Estimating the term…
A molding apparatus configured to mold a cured object by bringing a mold into contact with a curable composition on a processing target substrate and curing the curable composition with the mold in contact therewith includes a priming unit configured to perform processing for applying a mold release agent onto a surface of the mold that contacts the curable composition, the priming unit being configured to apply the mold release agent onto the mold by placing a curable composition containing the mold release agent on a priming substrate, curing the curable composition while the curable composition and the mold in contact with each other, and separating the mold and the cured curable composition. The molding apparatus further includes a recovery unit configured to perform a recovery processing to recover a state of a surface of the priming substrate on which the curable composition is placed.
A molding method for molding a cured object by bringing a mold into contact with a first curable composition on a processing target substrate and curing the first curable composition with the mold in contact therewith, the molding method comprising:
A method for manufacturing a product, the method comprising:
Dependencies are inferred from the claim text.