Photodetectors with an integrated waveguide core
AssigneeGlobalFoundries U.S. Inc.
InventorsYusheng Bian, Sujith Chandran, Won Suk Lee, Abdelsalam Aboketaf
Life of this patent
Estimating the term…
Abstract
Structures for a photonics chip that include a photodetector and methods of forming such structures. The structure comprises a photodetector including a pad and a semiconductor layer on the pad. The pad includes a side edge and a first waveguide core that extends from the side edge adjacent to the semiconductor layer. The structure further comprises a second waveguide core including a section adjoined to the side edge of the pad adjacent to the first waveguide core.
Claims20
A structure for a photonics chip, the structure comprising:
- a photodetector including a pad and a semiconductor layer on the pad, the pad including a first side edge and a first waveguide core that extends from the first side edge adjacent to the semiconductor layer, the semiconductor layer having a longitudinal axis, and the first waveguide core including a longitudinal axis that is inclined relative to the longitudinal axis of the semiconductor layer;
- and
- a second waveguide core including a section adjoined to the first side edge of the pad adjacent to the first waveguide core.
A method of forming a structure for a photonics chip, the method comprising:
- forming a photodetector that includes a pad and a semiconductor layer on the pad, wherein the pad includes a side edge and a first waveguide core that extends from the side edge adjacent to the semiconductor layer, the semiconductor layer has a longitudinal axis, and the first waveguide core includes a longitudinal axis that is inclined relative to the longitudinal axis of the semiconductor layer;
- and
- forming a second waveguide core that includes a section adjoined to the side edge of the pad adjacent to the first waveguide core.
Dependencies are inferred from the claim text.