Fluid control valve and fluid control device
AssigneeHORIBA STEC, Co., Ltd.
InventorsYuya Kawai, Atsushi Ieki
Life of this patent
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Abstract
In order to configure a fluid control valve to have the life prolonged while keeping an inexpensive configuration, the fluid control valve includes: a valve body that can come into contact and separate from a valve seat; an actuator that causes the valve body to move; a diaphragm member provided between the valve body and the actuator and having a protruding part protruding toward the valve body; and a sphere housed inside the protruding part, in which the actuator moves the valve body by pressing a distal end of the protruding part through the sphere, and the sphere is formed of a ceramic material.
Claims5
A fluid control valve comprising:
- a valve body that can come into contact and separate from a valve seat;
- an actuator that causes the valve body to move;
- a diaphragm member provided between the valve body and the actuator and having a protruding part protruding toward the valve body;
- and
- a sphere housed inside the protruding part,
- wherein
- the actuator moves the valve body by pressing a distal end of the protruding part through the sphere,
- the sphere is formed of a ceramic material,
- the sphere is formed of alumina,
- in the diaphragm member, the protruding part has a wall thickness of 100 to 130 μm, and
- the sphere is not subjected to surface coating.
Dependencies are inferred from the claim text.