Gate valve
AssigneeHirata Corporation
InventorBungo Matsumoto
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AssigneeHirata Corporation
InventorBungo Matsumoto
Estimating the term…
A gate valve includes: a moving body that integrally moves with the valve element; and a converting mechanism that moves the moving body in a perpendicular direction to the opening surface and an intersecting direction intersecting with the perpendicular direction. The converting mechanism includes: a first operation mechanism that moves in the intersecting direction and makes the moving body move in the intersecting direction, and a second operation mechanism that makes the moving body move in the perpendicular direction. An operation performed by the second operation mechanism includes an operation due to additional movement of the first operation mechanism to the intersecting direction from a state where the movement of the moving body in the intersecting direction is restricted.
A gate valve configured to press a valve element that includes a seal member to an opening surface where an opening that communicates with a processing part of a processing device that performs processing in vacuum thus sealing the opening, the gate valve comprising:
A gate valve configured to press a valve element that includes a seal member to an opening surface where an opening that communicates with a processing part of a processing device that performs processing in vacuum thus sealing the opening, the gate valve comprising:
Dependencies are inferred from the claim text.