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US 12,760,747 B2Granted
Vacuum pump
AssigneeEdwards Japan Limited
InventorHaruki Suzuki
Life of this patent
Estimating the term…
Abstract
A vacuum pump that limits accumulation of deposits while providing a satisfactory permissible flow rate is obtained. The vacuum pump includes a rotor, a plurality of stator portions that are disposed facing the rotor and have a gas compression function, and a reference member 301 that is one of members stacked toward an inlet port 101 from a base portion 129 and serves as a reference in an axial direction for the plurality of stator portions. The plurality of stator portions are disposed downstream of the reference member 301 (the side corresponding to the outlet port 133).
Claims11
A vacuum pump comprising:
- a casing including an inlet port;
- a base portion;
- a rotor rotationally held in the casing;
- a plurality of stator portions that are disposed facing the rotor and have a gas compression function;
- and
- an annular body that is one of members stacked toward the inlet port from the base portion, the annular body being for positioning the plurality of stator portions as a reference in an axial direction for the plurality of stator portions, wherein
- the plurality of stator portions include a plurality of stator blades of a turbomolecular pump portion, a plurality of stator blade spacers of the turbomolecular pump portion, and one threaded spacer of a threaded spacer pump portion,
- an entirety of the one threaded spacer is disposed on a downstream side with respect to the annular body,
- the annular body has a cooling pipe, and one stator portion of the plurality of stator portions that is positioned on the downstream side has a heater, and
- the entirety of the annular body is disposed on a side of the inlet port that is upstream relative to the stator blade positioned furthest downstream among the plurality of stator blades.
7 more elements
Dependencies are inferred from the claim text.