US 12,760,444 B2Granted

Single-crystal diamond and method of manufacturing the same

AssigneeSumitomo Electric Industries, Ltd.

InventorsYikang Zuo, Jin Hwa Lee, Yoshiki Nishibayashi, Minori Teramoto, Yutaka Kobayashi, Hitoshi Sumiya

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Abstract

A single-crystal diamond having an X-ray diffraction rocking curve with a half-width of 20 seconds or less, wherein the half-width of the X-ray diffraction rocking curve is measured with CuKα radiation in a (004) plane parallel arrangement using a diamond crystal as a first crystal in X-ray diffraction by a double-crystal method, a peak at a Raman shift in the range of 1332 cm−1 to 1333 cm−1 in a Raman spectrum has a half-width of 2.0 cm−1 or less, the single-crystal diamond has an etch-pit density of 10,000/cm2 or less, the etch-pit density is measured in an etching test, and the single-crystal diamond has a nitrogen content of more than 0.1 ppm and 50 ppm or less based on the number of atoms.

Claims15

Dependent claims

A single-crystal diamond having an X-ray diffraction rocking curve with a half-width of 20 seconds or less,

wherein the half-width of the X-ray diffraction rocking curve is measured with CuKα radiation in a (004) plane parallel arrangement using a diamond crystal as a first crystal in X-ray diffraction by a double-crystal method,
a peak at a Raman shift in the range of 1332 cm−1 to 1333 cm−1 in a Raman spectrum has a half-width of 2.0 cm−1 or less,
the single-crystal diamond has an etch-pit density of 10,000/cm2 or less,
the etch-pit density is measured in an etching test,
the single-crystal diamond has a nitrogen content of more than 0.1 ppm and 50 ppm or less based on the number of atoms, and
the single-crystal diamond has a NV center and has a NV center content of 0.05 ppm or more and 25 ppm or less.

3 more elements

Dependencies are inferred from the claim text.