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US 12,760,403 B2Granted
Deposition device
AssigneeSamsung Display Co., Ltd.
InventorsJung Hyun Ahn, Jaesuk Moon, Seung Jin Lee
Life of this patent
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Abstract
An embodiment provides a deposition device including a magnet part that includes magnets; and a substrate support that faces the magnet part and that supports a substrate, the substrate support includes a support plate and patterns formed on a first surface of the support plate, and each of the patterns corresponds to a space between neighboring magnets among the magnets or corresponds to the magnets.
Claims17
A deposition device comprising:
- a magnet part that includes magnets;
- and
- a substrate support that faces the magnet part and that supports a substrate, wherein
- the substrate support includes a support plate having a first surface facing the magnet part, and magnetic patterns formed on a second surface of the support plate, the support plate being interposed between the magnet part and the magnetic patterns, and
- each of the patterns corresponds to a space between neighboring magnets among the magnets or corresponds to the magnets.
2 more elements
A deposition device comprising:
- a magnet part that includes magnets disposed in a first direction;
- and
- a substrate support, wherein
- the substrate support includes:
- a support plate that has a first surface facing the magnet part and a second surface opposite to the first surface;
- and
- magnetic patterns formed on the second surface and arranged in the first direction, and
- the support plate is interposed between the magnet part and the magnetic patterns.
5 more elements
Dependencies are inferred from the claim text.