Substrate-conveying robot system and substrate-conveying robot
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorsSatoshi Hashizaki, Shinya Kitano, Ryousuke Kanamaru, Katsuhiro Yamashita, Tomoya Nagasawa
Life of this patent
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Abstract
A substrate-conveying robot system includes the controller for acquiring positional information on a notch or an orientation flat in a substrate based on an image captured by an image capturer from a lower side with respect to a substrate-handling hand in conveyance of the substrate.
Claims10
A substrate-conveying robot system comprising:
- a substrate-handling hand for conveying a substrate;
- an image capturer;
- a controller;
- and
- a horizontal multi-joint robot arm to which the substrate-handling hand is attached and that is arranged on the lower side with respect to the substrate-handling hand, the horizontal multi-joint robot arm includes a first arm, and a second arm arranged on the upper side with respect to the first arm and connected to the first arm, wherein
- the controller acquires positional information on a notch or an orientation flat in the substrate conveyed by the substrate-handling hand based on an image captured by the image capturer from a lower side with respect to the substrate-handling hand in conveyance of the substrate;
- the image capturer is arranged on the lower side with respect to the substrate-handling hand;
- the image capturer is provided to the horizontal multi-joint robot arm;
- and
- the image capturer is arranged in an upper surface of the second arm;
- the substrate-handling hand includes a first hand arranged on the upper side with respect to the second arm, and a second hand arranged on the upper side with respect to the first hand;
- when one of the first hand and the second hand enters a substrate storage for storing the substrate in the conveyance of the substrate, another of the first hand and the second hand that is holding the substrate is moved to an avoidance position that is positioned on the upper side with respect to the second arm and overlaps the second arm;
- and
- the controller acquires the positional information on the notch or the orientation flat in the substrate conveyed by the substrate-handling hand based on the image of the substrate that is captured from the lower side when the other of the first hand and the second hand is moved to the avoidance position in the conveyance of the substrate.
A substrate-conveying robot system comprising:
- a substrate-handling hand for conveying a substrate;
- an image capturer;
- a controller;
- and
- a horizontal multi-joint robot arm to which the substrate-handling hand is attached and that is arranged on the lower side with respect to the substrate-handling hand, the horizontal multi-joint robot arm includes a first arm, and a second arm arranged on the upper side with respect to the first arm and connected to the first arm, wherein
- the substrate-handling hand includes a first hand arranged on the upper side with respect to the second arm, and a second hand arranged on the upper side with respect to the first hand;
- the controller is configured to control the substrate-conveying robot system so that, when one of the first hand and the second hand enters a substrate storage for storing the substrate in conveyance of the substrate, another of the first hand and the second hand that is holding the substrate is moved to an avoidance position that is positioned on the upper side with respect to the second arm and overlaps the second arm;
- and
- the controller acquires positional information on a notch or an orientation flat in the substrate conveyed by the substrate-handling hand based on an image of the substrate that is captured from a lower side when the other of the first hand and the second hand is moved to the avoidance position in the conveyance of the substrate.
A method of operating a substrate-conveying robot system that includes a substrate-handling hand for conveying a substrate, an image capturer, a horizontal multi-joint robot arm to which the substrate-handling hand is attached and that is arranged on the lower side with respect to the substrate-handling hand, the horizontal multi-joint robot arm includes a first arm, and a second arm arranged on the upper side with respect to the first arm and connected to the first arm, and the substrate-handling hand includes a first hand arranged on the upper side with respect to the second arm, and a second hand arranged on the upper side with respect to the first hand, the method comprising:
- controlling the substrate-conveying robot system so that, when one of the first hand and the second hand enters a substrate storage for storing the substrate in conveyance of the substrate, another of the first hand and the second hand that is holding the substrate is moved to an avoidance position that is positioned on the upper side with respect to the second arm and overlaps the second arm;
- and
- acquiring positional information on a notch or an orientation flat in the substrate conveyed by the substrate-handling hand based on an image of the substrate that is captured from a lower side when the other of the first hand and the second hand is moved to the avoidance position in the conveyance of the substrate.
Dependencies are inferred from the claim text.