Dual robot including splayed end effectors and systems and methods including same

A method of transporting substrates within an electronic device processing system, comprising:

• rotating a first upper arm of a first arm assembly of a robot, wherein the rotating causes a first end effector of the first arm assembly to move along a first path, wherein the first arm assembly comprises:
• the first upper arm rotatable about a first axis;
• a first forearm adapted for rotation relative to the first upper arm about a second axis at a position spaced from the first axis, the first forearm comprising a first wrist member drive assembly;
• a first wrist member adapted for rotation relative to the first forearm about a third axis at a position spaced from the second axis;
• and
• the first end effector coupled to the first wrist member and configured to support a first substrate,
• wherein the first wrist member drive assembly is configured to rotate the first wrist member at a first nonlinear rate and drive the first end effector in a first radial direction extending from the first axis along the first path;
• and
• rotating a second upper arm of a second arm assembly of the robot, wherein the rotating causes a second end effector of the second arm assembly to move along a second path, wherein the second arm assembly comprises:
• the second upper arm rotatable about the first axis;
• a second forearm adapted for rotation relative to the second upper arm about a fourth axis at a position spaced from the first axis, the second forearm comprising a second wrist member drive assembly, wherein the first forearm and the second forearm are vertically located between the first upper arm and the second upper arm;
• a second wrist member adapted for rotation relative to the second forearm about a fifth axis at a position spaced from the fourth axis;
• and
• the second end effector coupled to the second wrist member and configured to support a second substrate that does not overlap with the first substrate in any operating position of the first end effector or the second end effector,
• wherein the second wrist member drive assembly is configured to rotate the second wrist member at a second nonlinear rate and drive the second end effector in a second radial direction extending from the first axis along the second path and wherein the first path and the second path do not overlap.