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US 12,759,018 B2Granted
Surface modification in the vapor phase
AssigneeQuantum-Si Incorporated
InventorsGuojun Chen, Jeremy Lackey
Life of this patent
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Abstract
Aspects of the application provide methods of producing substrates having modified surfaces. In some aspects, methods of surface modification involve treating a surface of a substrate with an organic reagent in vapor phase to form an organic layer over the surface. In some aspects, methods of forming a stable surface coating on an oxidized surface are provided.
Claims21
A method of modifying a surface of a substrate, the method comprising:
- a) providing a substrate having a first surface portion and a second surface portion, wherein the substrate comprises a phosphorus-containing layer on the first surface portion, and wherein the first and second surface portions have different surface properties;
- b) treating the substrate with a first silane composition in liquid phase, wherein the first silane composition comprises a silane functionalizing agent that comprises a coupling moiety, and wherein the silane functionalizing agent preferentially functionalizes the second surface portion;
- and
- c) following (a) and (b), treating the substrate with a second silane composition in vapor phase, wherein the second silane composition forms a silane coating layer over the first and second surface portions.
1 more element
Dependencies are inferred from the claim text.