Chemical liquid supply equipment and chemical liquid supply method
AssigneeMarketech International Corp.
InventorsPing-Hsu Chen, Chien-Kuo Lu
Life of this patent
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Abstract
A chemical liquid supply equipment includes a casing, a connection module and a chemical drum rotating and conveying module. The casing has a chemical drum accommodating room, the connection module is installed in the chemical drum accommodating room of the casing, and the chemical drum rotating and conveying module is also installed in the chemical drum accommodating room of the casing to transport a chemical drum into the chemical drum accommodating room, and the chemical drum is rotated to align with the connecting module.
Claims16
A chemical liquid supply equipment, comprising:
- a casing having a chemical drum accommodating room;
- a connection module equipped in the chemical drum accommodating room of the casing;
- and
- a chemical drum rotating and conveying module equipped in the chemical drum accommodating room of the casing to transport the chemical drum into the chemical drum accommodating room and simultaneously transport and rotate the chemical drum to align with the connection module, wherein the chemical drum rotating and conveying module, comprising:
- a first conveying device;
- and
- a second conveying device, wherein the first conveying device and the second conveying device are disposed in parallel to move and rotate the chemical drum,
- wherein the first conveying device and the second conveying device respectively comprise:
- two first power rollers;
- a first idler roller disposed in parallel with and between the two first power rollers;
- a second power roller disposed in parallel with the two first power rollers and the first idler roller;
- and
- two second idler rollers disposed in parallel with the two first power rollers, the first idler roller and the second power roller, wherein the second power roller is disposed between the two second idler rollers, wherein a length of the two first power rollers is greater than a length of the second power roller, and a length of the first idler roller is greater than a length of the two second idler rollers, and the length of the two first power rollers is equal to the length of the first idler roller, and the length of the second power roller is equal to the length of the two second idler rollers.
A chemical liquid supply method, comprising:
- providing a chemical drum;
- transporting the chemical drum by a chemical drum rotating and conveying module of a chemical liquid supply equipment into a chemical drum accommodating room of the chemical liquid supply equipment;
- detecting an opening of the chemical drum;
- and
- simultaneously transporting and rotating the chemical drum by the chemical drum rotating and conveying module to align the opening of the chemical drum with a cap rotation device of a connection module of the chemical liquid supply equipment.
Dependencies are inferred from the claim text.