Calabash-shaped MIM capacitor structure and fabricating method of the same

A calabash-shaped metal-insulator-metal (MIM) capacitor structure, comprising:

• a stacked layer, wherein the stacked layer comprises a plurality of dielectric layers, and the plurality of dielectric layers comprises a first nitrogen-containing silicon layer, a first oxygen-containing silicon layer, a second nitrogen-containing silicon layer and a second oxygen-containing silicon layer disposed in sequence from bottom to top;
• and
• an MIM capacitor disposed within the stacked layer, wherein the MIM capacitor comprises a calabash-shaped the profile, and calabash-shaped profile comprises a rounded bottom, a narrow body and a rounded shoulder disposed from bottom to top in sequence, wherein the rounded bottom is embedded in the first oxygen-containing silicon layer, the narrow body is embedded in the second nitrogen-containing silicon layer, and the rounded shoulder is embedded in the second oxygen-containing silicon layer.