Memory device
AssigneeKioxia Corporation
InventorHiroaki Naito
Life of this patent
Estimating the term…
Abstract
A memory pillar penetrates first conductors that are aligned in a first direction separately from each other. A first member penetrates the first conductors in the first direction and has a first portion and second portions. The first portion extends in a second direction intersecting with the first direction. The second portions are aligned spaced apart in the second direction on an upper surface of the first portion. A length of each second portion in a third direction intersecting with the first and second directions is shorter than a length of the first portion in the third direction. The first member further includes a bridge that is positioned on the upper surface of the first portion and between two neighboring ones of the second portions and extends on the upper surface of the first portion across both ends of the first portion.
Claims20
A memory device comprising:
- a plurality of first conductors aligned in a first direction separately from each other;
- a memory pillar that penetrates the plurality of first conductors in the first direction and includes a semiconductor and a film that surrounds the semiconductor;
- and
- a first member that penetrates the plurality of first conductors in the first direction and has a first portion and a plurality of second portions, the first portion extending in a second direction intersecting with the first direction, the plurality of second portions being aligned spaced apart in the second direction on an upper surface of the first portion, a length of each of the plurality of second portions in a third direction intersecting with the first direction and the second direction being shorter than a length of the first portion in the third direction, wherein
- the first member further includes a bridge that is positioned on the upper surface of the first portion and between two neighboring ones of the plurality of second portions and extends on the upper surface of the first portion across both ends of the first portion.
A memory device comprising:
- a plurality of first conductors aligned in a first direction separately from each other;
- a memory pillar that penetrates the plurality of first conductors in the first direction and includes a semiconductor and a film that surrounds the semiconductor;
- and
- a first member that penetrates the plurality of first conductors in the first direction and has a first portion and a plurality of second portions, the first portion extending in a second direction intersecting with the first direction, the plurality of second portions being aligned spaced apart in the second direction on an upper surface of the first portion, a length of each of the plurality of second portions in a third direction intersecting with the first direction and the second direction being shorter than a length of the first portion in the third direction, and the first portion and the second portions being continuous.
Dependencies are inferred from the claim text.